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Fully depleted charge‐coupled device design and technology development
Abstract
We describe the advancement of fully depleted charge-coupled device (CCD) technology for scientific applications. Recent efforts on 650–725 (Formula presented.) m-thick CCDs for direct dark-matter and radiation detection with single-electron sensitivity are described, as well as the technology transfer of the fully depleted CCD technology to 200 mm-wafer fabrication facilities.
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