Lawrence Berkeley National Laboratory

The incorporation of boron into a diamond lattice holds the potential to advance X-ray optics, offering the capability to manipulate various parameters of the lattice. This includes enhancing near-infrared absorption relative to pure diamond, thereby enabling Q-switchable optics. The use of MeV boron implantation emerges as a promising method for precisely doping the diamond lattice. However, for these optics to function effectively as Bragg-reflecting mirrors, ion implantation must be executed with meticulous attention to maintaining a strain-free, perfect diamond lattice. This study aimed to investigate the feasibility of utilizing a 9 MeV ion beam for high energy boron implantation. Different areas of a high-pressure, high-temperature (HPHT) diamond sample were subjected to irradiation with 9 MeV Boron ions, ranging in fluences from 5×1015 to 2.5×1016ions/cm2. Following boron implantation, high-temperature vacuum annealing was performed to restore the diamond lattice. Our assessment utilized X-ray rocking curve imaging, surface profilometry, and micro-Raman spectroscopy, with additional observations on near-infrared transmission properties. Our measurement of high-quality Bragg reflection through X-ray rocking curve imaging, sensitive to implantation-induced strain and defects, served as an key diagnostic for the effectiveness of this ion-implanted sample as a Bragg-reflecting optic.