Skip to main content
Download PDF
- Main
Development of a new generation of optical slope measuring profiler
Abstract
We overview the results of a broad US collaboration, including all DOE synchrotron labs (ALS, APS, BNL, NSLS-II, LLNL, LCLS), major industrial vendors of x-ray optics (InSync, Inc., SSG Precision Optronics-Tinsley, Inc., Optimax Systems, Inc.), and with active participation of HBZ-BESSY-II optics group, on development of a new generation slope measuring profiler -- the optical slope measuring system (OSMS). The desired surface slope measurement accuracy of the instrument is <50 nrad (absolute) that is adequate to the current and foreseeable future needs for metrology of x-ray optics for the next generation of light sources.
Main Content
For improved accessibility of PDF content, download the file to your device.
If you recently published or updated this item, please wait up to 30 minutes for the PDF to appear here.
Enter the password to open this PDF file:
File name:
-
File size:
-
Title:
-
Author:
-
Subject:
-
Keywords:
-
Creation Date:
-
Modification Date:
-
Creator:
-
PDF Producer:
-
PDF Version:
-
Page Count:
-
Page Size:
-
Fast Web View:
-
Preparing document for printing…
0%