UC Berkeley

Microfabrication, the set of manufacturing techniques used to make computer chips, displays, MEMS, and other devices, is famously difficult, slow, and capital equipment heavy. In this dissertation we propose a much simpler path toward rapid prototyping of microfabricated devices by deposition of nanoparticles in vacuum. We will discuss generation of nanoparticles of standard microfabrication materials such as metals, oxides, and semiconductors, as well as methods to manipulate these as aerosols in low-pressure gas, culminating in a demonstration of multimaterial printing. We will then describe electrical charging of nanoparticles and develop a new method to electrostatically focus and accelerate nanoparticles theoretically capable of printing with sub-1 μm resolution. Finally, we will detail the future work required to 3D print silicon transistors and conclude our new manufacturing process will likely be faster and cheaper than standard microfabrication for making small quantities of simple chips.