- Schloz, Marcel;
- Pekin, Thomas C;
- Brown, Hamish G;
- Byrne, Dana O;
- Esser, Bryan D;
- Terzoudis-Lumsden, Emmanuel;
- Taniguchi, Takashi;
- Watanabe, Kenji;
- Findlay, Scott D;
- Haas, Benedikt;
- Ciston, Jim;
- Koch, Christoph T
A detailed analysis of ptychography for three-dimensional (3D) phase reconstructions of thick specimens is performed. We introduce multi-focus ptychography, which incorporates a 4D-STEM defocus series to enhance the quality of 3D reconstructions along the beam direction through a higher overdetermination ratio. This method is compared with established multi-slice ptychography techniques, such as conventional ptychography, regularized ptychography, and multi-mode ptychography. Additionally, we contrast multi-focus ptychography with an alternative method that uses virtual optical sectioning through a reconstructed scattering matrix (S-matrix), which offers more precise 3D structure information compared to conventional ptychography. Our findings from multiple 3D reconstructions based on simulated and experimental data demonstrate that multi-focus ptychography surpasses other techniques, particularly in accurately reconstructing the surfaces and interface regions of thick specimens.