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Scholarly Works (3 results)
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Article
Fabrication and performance of nanoscale ultra-smooth programmed defects for EUV Lithography
Olynick, D.L.
;
Salmassi, F.
;
Liddle, J.A.
;
Mirkarimi, P.B.
;
Spiller, E.
;
Baker, S.L.
;
Robinson, J.
LBL Publications
(2008)
Article
Smoothing EUVL mask substrate defects with an emphasis on real-world pits
Mirkarimi, P.B.
;
Spiller, E.
;
Baker, S.L.
;
Robinson, J.C.
;
Salmassi, F.
;
Park, S.-J.
;
Liang, T.
;
Stivers, A.R.
;
Ultanir, E.
LBL Publications
(2006)
Article
Advancing the ion beam thin film planarization process for the smoothing of substrate particles
Mirkarimi, P.
;
Spiller, E.
;
Baker, S.
;
Robinson, J.
;
Stearns, D.
;
Liddle, J.A.
;
Salmassi, F.
;
Liang, T.
;
Stivers, A.
LBL Publications
(2004)
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