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Open Access Publications from the University of California

Scholarly Works (35 results)

  • Article
LBL Publications (2005)
    Cover page: Reflection Mode Imaging with High Resolution X-ray Microscopy
    • Article
    Lawrence Berkeley National Laboratory (2005)
      Cover page: Spin-on-glass coatings for the generation of super-polished substrates for extreme ultraviolet optics
      • Article
      Lawrence Berkeley National Laboratory (2006)
        Cover page: Scanning X-ray Microscopy Investigations into the Electron Beam Exposure Mechanism of Hydrogen Silsesquioxane Resists
        • Article
        LBL Publications (2007)
          Cover page: Study of etch processes for the fabrication of extreme ultraviolet phase-only diffraction elements
          • Article
          LBL Publications (2002)
            Cover page: High-resolution and high-efficiency phase zone plate for EUV applications
            • Article
            LBL Publications (2008)
              Cover page: Revised Optical constants of tantalum for EUV mask absorber materials
              • Article
              LBL Publications (2014)
                Cover page: Variable line spacing diffraction grating fabricated by direct write lithography for synchrotron beamline applications
                • Article
                LBL Publications (2007)
                  Cover page: Multilayer Phase-only diffraction gratings: Fabrication and application of EUV Optics
                  • Article
                  Lawrence Berkeley National Laboratory (2008)
                    Cover page: Holographic optical elements for the extreme-ultraviolet regime
                    • Article
                    Lawrence Berkeley National Laboratory (2003)
                      Cover page: Design and fabrication of advanced EUV diffractive elements
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