We describe a technique to optimally tune and calibrate bendable x-ray optics for sub-micron focusing. The focusing is divided between two elliptically cylindrical reflecting elements, a Kirkpatrick-Baez (KB) pair. Each optic is shaped by applying unequal bending couples to each end of a flat mirror. The developed technique allows optimal tuning of these systems using surface slope data obtained with a slope measuring instrument, the long trace profiler (LTP). Due to the near linearity of the problem, the minimal set of data necessary for the tuning of each bender, consists of only three slope traces measured before and after a single adjustment of each bending couple. The data are analyzed with software realizing a method of regression analysis with experimentally found characteristic functions of the benders. The resulting approximation to the functional dependence of the desired shape provides nearly final settings. Moreover, the characteristic functions of the benders found in the course of tuning, can be used for retuning to a new desired shape without removal from the beamline and re-measuring. We perform a ray trace, using profiler data for the finally tuned optics, predicting the performance to be expected during use of the optics on the beamline.

Brightness preservation requirements for ever brighter synchrotron radiation and free electron laser beamlines require surface slope tolerances of x-ray optics on the order of 0.2 mu rad, or better. Hence, the accuracy of dedicated surface slope metrology must be 0.1 mu rad, or even less. Achieving this level of measurement accuracy with the flagship instrument at synchrotron radiation metrology laboratories, the Long Trace Profiler (LTP), requires all significant sources of systematic, random, and instrumental drift errors to be identified, and reduced or eliminated. In this respect, the performance of certain components of the Advanced Light Source LTP-II design [Kirschman, et al., Proc. SPIE, 7077, 70770A-12 (2008)] is analyzed, considering the principal justification for inclusion of each component, possible systematic error due to the quality of its optical material, and drift effects due to generated heat, etc. We investigate the effects of replacement of the existing diode laser with a fiber-coupled laser light source, and demonstrate that reducing the number of components by using a single beam on the surface under test (SUT), rather than an original double beam maintains, or even improves the accuracy of measurement with our LTP. Based on the performance of the upgraded LTP, we trace the further steps for improving of the LTP optical system.

Two recently commissioned infrared beamlines on the 1.4 bending magnet port at the Advanced Light Source, LBNL, are described. Using a synchrotron as an IR source provides three primary advantages: increased brightness, very fast light pulses, and enhanced far-IRflux. The considerable brightness advantage manifests itself most beneficially when performing spectroscopy on a microscopic length scale. Beamline (BL) 1.4.3 is a dedicated FTIR spectromicroscopy beamline, where a diffraction-limited spot size using the synchrotron source is utilized. BL 1.4.2 consists of a vacuum FTIR bench with a wide spectral range and step-scan capability. This BL makes use of the pulsed nature of the synchrotron light as well as the far-IR flux. Fast timing is demonstrated by observing the pulses from the electron bunch storage pattern at the ALS. Results from several experiments from both IR beamlines will be presented as an overview of the IR research currently being done at the ALS.

The task of designing high performance X-ray optical systems requires the development of sophisticated X-ray scattering calculations based on rigorous information about the optics. One of the most insightful approaches to these calculations is based on the power spectral density (PSD) distribution of the surface height. The major problem of measurement of a PSD distribution with an interferometric and/or atomic force microscope arises due to the unknown Modulation Transfer Function (MTF) of the instruments. The MTF characterizes the perturbation of the PSD distribution at higher spatial frequencies. Here, we describe a new method and dedicated test surfaces for calibration of the MTF of a microscope. The method is based on use of a specially designed Binary Pseudo-random (BPR) grating. Comparison of a theoretically calculated PSD spectrum of a BPR grating with a spectrum measured with the grating provides the desired calibration of the instrumental MTF. The theoretical background of the method, as well as results of experimental investigations are presented.