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Scholarly Works (3 results)
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Article
Plasma drift and non-uniformity effects in plasma immersion ion implantation
Keidar, M.
LBL Publications
(2000)
Article
Some Consequences to Ion Source Behavior of High Plasma Drift Velocity
Brown, I G
;
Monteiro, O R
;
Bilek, M M M
;
Keidar, M
;
Oks, E M
;
Vizir, A
LBL Publications
(1999)
Article
Some Consequences to Ion Source Behavior of High Plasma Drift Velocity
Brown, I G
;
Monteiro, O R
;
Bilek, M M M
;
Keidar, M
;
Oks, E M
;
Vizir, A
LBL Publications
(1999)
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