- Ye, Dan;
- Rongpipi, Sintu;
- Litofsky, Joshua H;
- Lee, Youngmin;
- Culp, Tyler E;
- Yoo, Sang Ha;
- Jackson, Thomas N;
- Wang, Cheng;
- Gomez, Esther W;
- Gomez, Enrique D
Resonant soft X-ray scattering (RSoXS) leverages chemical specificity to characterize thin films but is limited near the nitrogen edge. The challenge is that commercially available X-ray transparent substrates are composed of Si 3 N 4 and thereby absorb incident X-rays and generate incoherent fluorescence. To overcome this challenge, we designed and fabricated Al 2 O 3 free-standing films for use as RSoXS windows. Al 2 O 3 films offer higher X-ray transmittance and minimal fluorescence near the nitrogen edge. As an example, Al 2 O 3 windows allow for nitrogen RSoXS of conjugated block copolymer thin films that reveal domain spacings, which are not apparent with commercially available Si 3 N 4 substrates.