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Open Access Publications from the University of California

Scholarly Works (3 results)

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Article

Ion Beam Synthesis of SiGe Alloy Layers

Im, S.

LBL Publications (1994)

Cover page: Ion Beam Synthesis of SiGe Alloy Layers

Article

Formation of Buried Epitaxial Si-Ge Alloy Layers in Si <100> Crystal by High Dose Ge Ion Implantation

LBL Publications (1991)

Cover page: Formation of Buried Epitaxial Si-Ge Alloy Layers in Si <100> Crystal by High Dose Ge Ion Implantation

Article

Defect Control During Solid Phase Epitaxial Growth of SiGe Alloy Layers

LBL Publications (1993)

Cover page: Defect Control During Solid Phase Epitaxial Growth of SiGe Alloy Layers