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eScholarship
Open Access Publications from the University of California

Scholarly Works (7 results)

  • Article
Lawrence Berkeley National Laboratory (2010)
    Cover page: The Study on the Real Defect on EUV Blankmask and Strategy of EUV Mask Inspection
    • Article
    • Peer Reviewed
    Lawrence Berkeley National Laboratory (2010)
      Cover page: A study of defects on EUV mask using blank inspection, patterned mask inspection, and wafer inspection
      • Article
      Lawrence Berkeley National Laboratory (2011)
        Cover page: Printability and inspectability of Defects on the EUV Mask for sub32nm Half Pitch HVM Application
        • Article
        LBL Publications (2009)
          Cover page: Zoneplate lenses for EUV microscopy
          • Article
          LBL Publications (2008)
            Cover page: Achieving diffraction-limited EUV aerial image microscopy
            • Article
            • Peer Reviewed
            UCLA Previously Published Works (2005)
              Cover page: Eliminating disparities in diabetes care: The impact of disease management strategies within triad.
              • Article
              LBL Publications (2010)
                Cover page: Effects of carbon contamination on the printing performance of extreme ultraviolet masks
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