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eScholarship
Open Access Publications from the University of California

Scholarly Works (9 results)

  • Article
  • Peer Reviewed
Lawrence Berkeley National Laboratory (2008)
    Cover page: Experimental and model-based study of the robustness of line-edge roughness metric extraction in the presence of noise
    • Article
    Lawrence Berkeley National Laboratory (2005)
      Cover page: Resist-based measurement of contrast transfer function in a 0.3-NA microfield optic
      • Article
      Lawrence Berkeley National Laboratory (2005)
        Cover page: Modeling of EUV photoresists with a resist point spread function
        • Article
        Lawrence Berkeley National Laboratory (2005)
          Cover page: Lithographic measurement of EUV flare in the 0.3-NA Micro Exposure Tool optic at the Advanced Light Source
          • Article
          Lawrence Berkeley National Laboratory (2005)
            Cover page: Critical dimension sensitivity to post-exposure bake temperature variation in EUV photoresists
            • Article
            • Peer Reviewed
            LBL Publications (2005)
              Cover page: Characterization of the synchrotron-based 0.3-NA EUV microexposure tool at the ALS
              • Article
              Lawrence Berkeley National Laboratory (2005)
                Cover page: Two-wave pattern shift aberration monitor for centrally obscured optical systems
                • Article
                LBL Publications (2005)
                  Cover page: Investigation of the current resolution limits of advanced EUV resists
                  • Article
                  Lawrence Berkeley National Laboratory (2005)
                    Cover page: EUV microexposures at the ALS using the 0.3-NA MET projection optics
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