- Xie, Jingxu;
- Zhang, Zuocheng;
- Zhang, Haodong;
- Nagarajan, Vikram;
- Zhao, Wenyu;
- Kim, Ha-Leem;
- Sanborn, Collin;
- Qi, Ruishi;
- Chen, Sudi;
- Kahn, Salman;
- Watanabe, Kenji;
- Taniguchi, Takashi;
- Zettl, Alex;
- Crommie, Michael F;
- Analytis, James;
- Wang, Feng
Advanced microelectronics in the future may require semiconducting channel materials beyond silicon. Two-dimensional (2D) semiconductors, with their atomically thin thickness, hold great promise for future electronic devices. One challenge to achieving high-performance 2D semiconductor field effect transistors (FET) is the high contact resistance at the metal-semiconductor interface. In this study, we develop a charge-transfer doping strategy with WSe2/α-RuCl3 heterostructures to achieve low-resistance ohmic contact for p-type monolayer WSe2 transistors. We show that hole doping as high as 3 × 1013 cm-2 can be achieved in the WSe2/α-RuCl3 heterostructure due to its type-III band alignment, resulting in an ohmic contact with resistance of 4 kΩ μm. Based on that, we demonstrate p-type WSe2 transistors with an on-current of 35 μA·μm-1 and an ION/IOFF ratio exceeding 109 at room temperature.