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Scholarly Works (4 results)
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Article
Integration of Ion Implantation with Scanning Probe Alignment
Persaud, A.
;
Rangelow, I.W.
;
Schenkel, T.
LBL Publications
(2008)
Article
Ion Implantation with Scanning Probe Alignment
Persaud, A.
;
Liddle, J.A.
;
Schenkel, T.
;
Bokor, J.
;
Ivanov, Tzv.
;
Rangelow, I.W.
Lawrence Berkeley National Laboratory
(2005)
Article
Peer Reviewed
Single ion implantation with scanning probe alignment
Persaud, A.
;
Allen, F.I.
;
Gicquel, F.
;
Park, S.J.
;
Liddle, J.A.
;
Schenkel, T.
;
Ivanov, Tzv.
;
Ivanova, K.
;
Rangelow, I.W.
;
Bokor, J.
Lawrence Berkeley National Laboratory
(2004)
Article
Open questions in electronic sputtering of solids by slow highly charged ions with respect to applications in single ion implantation
Schenkel, T.
;
Rangelow, I.W.
;
Keller, R.
;
Park, S.J.
;
Nilsson, J.
;
Persaud, A.
;
Radmilovic, V.R.
;
Liddle, J.A.
;
Grabiec, P.
;
Bokor, J.
;
Schneider, D.H.
Lawrence Berkeley National Laboratory
(2003)
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