Ultrasound technologies can be applied to a variety of applications, such as medical
imaging/therapeutics, materials assessment, flow rate measurement and others. Piezoelectric
micromachined ultrasonic transducers (PMUTs) have advantages over the traditional bulk
transducers in wide bandwidth, small size, and low cost. This work proposes to boost
PMUT’s acoustic performance further including vibrational amplitude, acoustic pressure and
electromechanical coupling by using the pinning boundary structure and to explore various
new applications.
The equivalent circuit model for pinned boundary PMUTs has been developed and validated
with simulation results in terms of mode shape and displacement of the piezoelectric
diaphragm under the alternative electrical voltage inputs. Prototype devices with pinned
boundary are then fabricated without adding any fabrication complexity as compared to the
conventional fabrication process of PMUTs by modifying the mask designs. Fabrication
limitation of PMUTs with low resonant frequency is also investigated by fabricating
prototype chips that operate at a resonant frequency of 338 kHz in air to experimentally detect
objects at 22 cm away. Furthermore, testing results show a measured 2.5 times improvement
in center displacement and 3.3 times improvement in the pressure output as compared with
those PMUTs based on the traditional design with clamped boundary. The measured mode
shape deformation results match well with the analytical and simulation results and a dualelectrode
pinned PMUT structure is proposed to enable a single chip for both transmitting
and receiving functionality without sacrificing the improved acoustic performance.
In the area of practical applications, a tilt angle sensing chip based on the PMUT device has
been demonstrated based on the amplitude of signals from the receiver PMUT. It is found
that the measured sensing results match well with theoretical predictions with an average
error of ±0.7 degree within the tilting range of plate between -8 to 8 degrees. A wireless
power transfer system is then proposed based on a pinned ring PMUT transmitting array to
provide a maximum efficiency of 57% at a focus point 2.7 mm away at a resonant frequency
of 250 kHz.